2/26/2012	1:46:30 AM	Helium valve closed
2/26/2012	1:46:30 AM	H2 valve closed
2/26/2012	1:46:30 AM	BCl3 valve closed
2/26/2012	1:46:30 AM	PH3 valve closed
2/26/2012	1:46:30 AM	SiCl4 pre valve closed
2/26/2012	1:46:30 AM	SiCl4 post valve closed
2/26/2012	1:46:30 AM	Main Vac valve closed
2/26/2012	1:46:30 AM	Bypass valve closed
2/26/2012	1:46:30 AM	Bubbler valve closed
2/26/2012	1:46:30 AM	Helium MFC set to  0.000000
2/26/2012	1:46:30 AM	H2 MFC set to  0.000000
2/26/2012	1:46:30 AM	BCl3 MFC set to  0.000000
2/26/2012	1:46:30 AM	PH3 MFC set to  0.000000
2/26/2012	1:46:30 AM	SiCl4 MFC set to  0.000000
2/26/2012	1:46:30 AM	Bypass solenoid MFC set to  0.000000
2/26/2012	1:46:30 AM	Tube furnace set to 0
2/26/2012	1:46:33 AM	Helium valve closed
2/26/2012	1:46:33 AM	BCl3 valve closed
2/26/2012	1:46:34 AM	PH3 valve closed
2/26/2012	1:46:34 AM	SiCl4 pre valve closed
2/26/2012	1:46:34 AM	SiCl4 post valve closed
2/26/2012	1:46:34 AM	Main Vac valve closed
2/26/2012	1:46:34 AM	Bypass valve closed
2/26/2012	1:46:34 AM	Bubbler valve closed
2/26/2012	1:46:34 AM	H2 valve opened
2/26/2012	1:46:34 AM	Helium MFC set to  0.000000
2/26/2012	1:46:34 AM	H2 MFC set to  500.000000
2/26/2012	1:46:34 AM	BCl3 MFC set to  0.000000
2/26/2012	1:46:34 AM	PH3 MFC set to  0.000000
2/26/2012	1:46:34 AM	SiCl4 MFC set to  0.000000
2/26/2012	1:46:34 AM	Bypass solenoid MFC set to  0.000000
2/26/2012	1:46:34 AM	Tube furnace set to 0
2/26/2012	1:47:40 AM	Helium valve closed
2/26/2012	1:47:40 AM	BCl3 valve closed
2/26/2012	1:47:40 AM	PH3 valve closed
2/26/2012	1:47:40 AM	SiCl4 pre valve closed
2/26/2012	1:47:40 AM	SiCl4 post valve closed
2/26/2012	1:47:40 AM	Main Vac valve closed
2/26/2012	1:47:40 AM	Bypass valve closed
2/26/2012	1:47:40 AM	H2 valve opened
2/26/2012	1:47:40 AM	Bubbler valve opened
2/26/2012	1:47:40 AM	Helium MFC set to  0.000000
2/26/2012	1:47:40 AM	H2 MFC set to  500.000000
2/26/2012	1:47:40 AM	BCl3 MFC set to  0.000000
2/26/2012	1:47:40 AM	PH3 MFC set to  0.000000
2/26/2012	1:47:40 AM	SiCl4 MFC set to  0.000000
2/26/2012	1:47:40 AM	Bypass solenoid MFC set to  0.000000
2/26/2012	1:47:40 AM	Tube furnace set to 0
2/26/2012	1:47:41 AM	Helium valve closed
2/26/2012	1:47:41 AM	BCl3 valve closed
2/26/2012	1:47:41 AM	PH3 valve closed
2/26/2012	1:47:41 AM	SiCl4 pre valve closed
2/26/2012	1:47:41 AM	SiCl4 post valve closed
2/26/2012	1:47:41 AM	Main Vac valve closed
2/26/2012	1:47:41 AM	Bypass valve closed
2/26/2012	1:47:41 AM	H2 valve opened
2/26/2012	1:47:41 AM	Bubbler valve opened
2/26/2012	1:47:41 AM	Helium MFC set to  0.000000
2/26/2012	1:47:41 AM	H2 MFC set to  500.000000
2/26/2012	1:47:41 AM	BCl3 MFC set to  0.000000
2/26/2012	1:47:41 AM	PH3 MFC set to  0.000000
2/26/2012	1:47:41 AM	SiCl4 MFC set to  0.000000
2/26/2012	1:47:41 AM	Bypass solenoid MFC set to  0.000000
2/26/2012	1:47:41 AM	Tube furnace set to 1000
2/26/2012	2:12:41 AM	Helium valve closed
2/26/2012	2:12:41 AM	PH3 valve closed
2/26/2012	2:12:41 AM	Main Vac valve closed
2/26/2012	2:12:41 AM	Bypass valve closed
2/26/2012	2:12:41 AM	H2 valve opened
2/26/2012	2:12:41 AM	BCl3 valve opened
2/26/2012	2:12:41 AM	SiCl4 pre valve opened
2/26/2012	2:12:41 AM	SiCl4 post valve opened
2/26/2012	2:12:41 AM	Bubbler valve opened
2/26/2012	2:12:41 AM	Helium MFC set to  0.000000
2/26/2012	2:12:41 AM	H2 MFC set to  450.000000
2/26/2012	2:12:41 AM	BCl3 MFC set to  1.500000
2/26/2012	2:12:41 AM	PH3 MFC set to  0.000000
2/26/2012	2:12:41 AM	SiCl4 MFC set to  50.000000
2/26/2012	2:12:41 AM	Bypass solenoid MFC set to  0.000000
2/26/2012	2:12:41 AM	Tube furnace set to 1000
2/26/2012	2:31:41 AM	Helium valve closed
2/26/2012	2:31:41 AM	BCl3 valve closed
2/26/2012	2:31:41 AM	PH3 valve closed
2/26/2012	2:31:41 AM	SiCl4 pre valve closed
2/26/2012	2:31:41 AM	SiCl4 post valve closed
2/26/2012	2:31:41 AM	Main Vac valve closed
2/26/2012	2:31:41 AM	Bypass valve closed
2/26/2012	2:31:41 AM	H2 valve opened
2/26/2012	2:31:41 AM	Bubbler valve opened
2/26/2012	2:31:41 AM	Helium MFC set to  0.000000
2/26/2012	2:31:41 AM	H2 MFC set to  500.000000
2/26/2012	2:31:41 AM	BCl3 MFC set to  0.000000
2/26/2012	2:31:41 AM	PH3 MFC set to  0.000000
2/26/2012	2:31:41 AM	SiCl4 MFC set to  0.000000
2/26/2012	2:31:41 AM	Bypass solenoid MFC set to  0.000000
2/26/2012	2:31:41 AM	Tube furnace set to 750
2/26/2012	2:46:41 AM	H2 valve closed
2/26/2012	2:46:41 AM	BCl3 valve closed
2/26/2012	2:46:41 AM	PH3 valve closed
2/26/2012	2:46:41 AM	SiCl4 pre valve closed
2/26/2012	2:46:41 AM	SiCl4 post valve closed
2/26/2012	2:46:41 AM	Main Vac valve closed
2/26/2012	2:46:41 AM	Bypass valve closed
2/26/2012	2:46:41 AM	Helium valve opened
2/26/2012	2:46:41 AM	Bubbler valve opened
2/26/2012	2:46:41 AM	Helium MFC set to  500.000000
2/26/2012	2:46:41 AM	H2 MFC set to  0.000000
2/26/2012	2:46:41 AM	BCl3 MFC set to  0.000000
2/26/2012	2:46:41 AM	PH3 MFC set to  0.000000
2/26/2012	2:46:41 AM	SiCl4 MFC set to  0.000000
2/26/2012	2:46:41 AM	Bypass solenoid MFC set to  0.000000
2/26/2012	2:46:42 AM	Tube furnace set to 0
2/26/2012	3:06:42 AM	Helium valve closed
2/26/2012	3:06:42 AM	H2 valve closed
2/26/2012	3:06:42 AM	BCl3 valve closed
2/26/2012	3:06:42 AM	PH3 valve closed
2/26/2012	3:06:42 AM	SiCl4 pre valve closed
2/26/2012	3:06:42 AM	SiCl4 post valve closed
2/26/2012	3:06:42 AM	Main Vac valve closed
2/26/2012	3:06:42 AM	Bypass valve closed
2/26/2012	3:06:42 AM	Bubbler valve closed
2/26/2012	3:06:42 AM	Helium MFC set to  0.000000
2/26/2012	3:06:42 AM	H2 MFC set to  0.000000
2/26/2012	3:06:42 AM	BCl3 MFC set to  0.000000
2/26/2012	3:06:42 AM	PH3 MFC set to  0.000000
2/26/2012	3:06:42 AM	SiCl4 MFC set to  0.000000
2/26/2012	3:06:42 AM	Bypass solenoid MFC set to  0.000000
2/26/2012	3:06:42 AM	Tube furnace set to 0
2/26/2012	3:26:42 AM	Helium valve closed
2/26/2012	3:26:42 AM	H2 valve closed
2/26/2012	3:26:42 AM	BCl3 valve closed
2/26/2012	3:26:42 AM	PH3 valve closed
2/26/2012	3:26:42 AM	SiCl4 pre valve closed
2/26/2012	3:26:42 AM	SiCl4 post valve closed
2/26/2012	3:26:42 AM	Main Vac valve closed
2/26/2012	3:26:42 AM	Bubbler valve closed
2/26/2012	3:26:42 AM	Bypass valve opened
2/26/2012	3:26:42 AM	Helium MFC set to  0.000000
2/26/2012	3:26:42 AM	H2 MFC set to  0.000000
2/26/2012	3:26:42 AM	BCl3 MFC set to  0.000000
2/26/2012	3:26:42 AM	PH3 MFC set to  0.000000
2/26/2012	3:26:42 AM	SiCl4 MFC set to  0.000000
2/26/2012	3:26:42 AM	Bypass solenoid MFC set to  0.000000
2/26/2012	3:26:42 AM	Tube furnace set to 0
2/26/2012	3:27:29 AM	Helium valve closed
2/26/2012	3:27:29 AM	H2 valve closed
2/26/2012	3:27:29 AM	BCl3 valve closed
2/26/2012	3:27:29 AM	PH3 valve closed
2/26/2012	3:27:29 AM	SiCl4 pre valve closed
2/26/2012	3:27:29 AM	SiCl4 post valve closed
2/26/2012	3:27:29 AM	Main Vac valve closed
2/26/2012	3:27:29 AM	Bubbler valve closed
2/26/2012	3:27:29 AM	Bypass valve opened
2/26/2012	3:27:29 AM	Helium MFC set to  0.000000
2/26/2012	3:27:29 AM	H2 MFC set to  0.000000
2/26/2012	3:27:29 AM	BCl3 MFC set to  0.000000
2/26/2012	3:27:29 AM	PH3 MFC set to  0.000000
2/26/2012	3:27:29 AM	SiCl4 MFC set to  0.000000
2/26/2012	3:27:29 AM	Bypass solenoid MFC set to  0.000000
2/26/2012	3:27:29 AM	Tube furnace set to 0
2/26/2012	3:28:29 AM	Helium valve closed
2/26/2012	3:28:29 AM	H2 valve closed
2/26/2012	3:28:29 AM	BCl3 valve closed
2/26/2012	3:28:29 AM	PH3 valve closed
2/26/2012	3:28:29 AM	SiCl4 pre valve closed
2/26/2012	3:28:29 AM	SiCl4 post valve closed
2/26/2012	3:28:29 AM	Bypass valve closed
2/26/2012	3:28:29 AM	Bubbler valve closed
2/26/2012	3:28:29 AM	Main Vac valve opened
2/26/2012	3:28:29 AM	Helium MFC set to  0.000000
2/26/2012	3:28:29 AM	H2 MFC set to  0.000000
2/26/2012	3:28:29 AM	BCl3 MFC set to  0.000000
2/26/2012	3:28:29 AM	PH3 MFC set to  0.000000
2/26/2012	3:28:29 AM	SiCl4 MFC set to  0.000000
2/26/2012	3:28:29 AM	Bypass solenoid MFC set to  0.000000
2/26/2012	3:28:29 AM	Tube furnace set to 0
2/26/2012	4:28:29 AM	Run finished at 4:28 AM
2/26/2012	7:47:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/26/2012	7:47:30 AM	Recipe started at 7:47 AM
2/26/2012	7:47:30 AM	Helium valve closed
2/26/2012	7:47:30 AM	H2 valve closed
2/26/2012	7:47:30 AM	BCl3 valve closed
2/26/2012	7:47:30 AM	PH3 valve closed
2/26/2012	7:47:30 AM	SiCl4 pre valve closed
2/26/2012	7:47:30 AM	SiCl4 post valve closed
2/26/2012	7:47:30 AM	Main Vac valve closed
2/26/2012	7:47:30 AM	Bypass valve closed
2/26/2012	7:47:30 AM	Bubbler valve closed
2/26/2012	7:47:30 AM	Helium MFC set to  0.000000
2/26/2012	7:47:30 AM	H2 MFC set to  0.000000
2/26/2012	7:47:30 AM	BCl3 MFC set to  0.000000
2/26/2012	7:47:30 AM	PH3 MFC set to  0.000000
2/26/2012	7:47:30 AM	SiCl4 MFC set to  0.000000
2/26/2012	7:47:30 AM	Bypass solenoid MFC set to  0.000000
2/26/2012	7:47:30 AM	Tube furnace set to 0
2/26/2012	7:47:33 AM	H2 valve closed
2/26/2012	7:47:33 AM	BCl3 valve closed
2/26/2012	7:47:33 AM	PH3 valve closed
2/26/2012	7:47:33 AM	SiCl4 pre valve closed
2/26/2012	7:47:33 AM	SiCl4 post valve closed
2/26/2012	7:47:33 AM	Main Vac valve closed
2/26/2012	7:47:33 AM	Bypass valve closed
2/26/2012	7:47:33 AM	Bubbler valve closed
2/26/2012	7:47:33 AM	Helium valve opened
2/26/2012	7:47:33 AM	Helium MFC set to  500.000000
2/26/2012	7:47:33 AM	H2 MFC set to  0.000000
2/26/2012	7:47:33 AM	BCl3 MFC set to  0.000000
2/26/2012	7:47:33 AM	PH3 MFC set to  0.000000
2/26/2012	7:47:33 AM	SiCl4 MFC set to  0.000000
2/26/2012	7:47:33 AM	Bypass solenoid MFC set to  0.000000
2/26/2012	7:47:33 AM	Tube furnace set to 0
2/26/2012	7:48:38 AM	Helium valve closed
2/26/2012	7:48:38 AM	H2 valve closed
2/26/2012	7:48:38 AM	BCl3 valve closed
2/26/2012	7:48:38 AM	PH3 valve closed
2/26/2012	7:48:38 AM	SiCl4 pre valve closed
2/26/2012	7:48:38 AM	SiCl4 post valve closed
2/26/2012	7:48:38 AM	Main Vac valve closed
2/26/2012	7:48:38 AM	Bypass valve closed
2/26/2012	7:48:38 AM	Bubbler valve closed
2/26/2012	7:48:38 AM	Helium MFC set to  0.000000
2/26/2012	7:48:38 AM	H2 MFC set to  0.000000
2/26/2012	7:48:38 AM	BCl3 MFC set to  0.000000
2/26/2012	7:48:38 AM	PH3 MFC set to  0.000000
2/26/2012	7:48:38 AM	SiCl4 MFC set to  0.000000
2/26/2012	7:48:38 AM	Bypass solenoid MFC set to  0.000000
2/26/2012	7:48:38 AM	Tube furnace set to 0
2/26/2012	7:48:39 AM	Run finished at 7:48 AM
2/26/2012	7:48:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/26/2012	7:53:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/26/2012	7:53:30 AM	Recipe started at 7:53 AM
2/26/2012	7:53:30 AM	Helium valve closed
2/26/2012	7:53:30 AM	H2 valve closed
2/26/2012	7:53:30 AM	BCl3 valve closed
2/26/2012	7:53:30 AM	PH3 valve closed
2/26/2012	7:53:30 AM	SiCl4 pre valve closed
2/26/2012	7:53:30 AM	SiCl4 post valve closed
2/26/2012	7:53:30 AM	Main Vac valve closed
2/26/2012	7:53:30 AM	Bubbler valve closed
2/26/2012	7:53:30 AM	Bypass valve opened
2/26/2012	7:53:30 AM	Helium MFC set to  0.000000
2/26/2012	7:53:30 AM	H2 MFC set to  0.000000
2/26/2012	7:53:30 AM	BCl3 MFC set to  0.000000
2/26/2012	7:53:30 AM	PH3 MFC set to  0.000000
2/26/2012	7:53:30 AM	SiCl4 MFC set to  0.000000
2/26/2012	7:53:30 AM	Bypass solenoid MFC set to  0.000000
2/26/2012	7:53:30 AM	Tube furnace set to 0
2/26/2012	7:54:35 AM	Helium valve closed
2/26/2012	7:54:35 AM	H2 valve closed
2/26/2012	7:54:35 AM	BCl3 valve closed
2/26/2012	7:54:35 AM	PH3 valve closed
2/26/2012	7:54:35 AM	SiCl4 pre valve closed
2/26/2012	7:54:35 AM	SiCl4 post valve closed
2/26/2012	7:54:35 AM	Main Vac valve closed
2/26/2012	7:54:35 AM	Bubbler valve closed
2/26/2012	7:54:35 AM	Bypass valve opened
2/26/2012	7:54:35 AM	Helium MFC set to  0.000000
2/26/2012	7:54:35 AM	H2 MFC set to  0.000000
2/26/2012	7:54:35 AM	BCl3 MFC set to  0.000000
2/26/2012	7:54:35 AM	PH3 MFC set to  0.000000
2/26/2012	7:54:35 AM	SiCl4 MFC set to  0.000000
2/26/2012	7:54:35 AM	Bypass solenoid MFC set to  0.000000
2/26/2012	7:54:35 AM	Tube furnace set to 0
2/26/2012	7:55:35 AM	Helium valve closed
2/26/2012	7:55:35 AM	H2 valve closed
2/26/2012	7:55:35 AM	BCl3 valve closed
2/26/2012	7:55:35 AM	PH3 valve closed
2/26/2012	7:55:35 AM	SiCl4 pre valve closed
2/26/2012	7:55:35 AM	SiCl4 post valve closed
2/26/2012	7:55:35 AM	Bypass valve closed
2/26/2012	7:55:35 AM	Bubbler valve closed
2/26/2012	7:55:35 AM	Main Vac valve opened
2/26/2012	7:55:35 AM	Helium MFC set to  0.000000
2/26/2012	7:55:35 AM	H2 MFC set to  0.000000
2/26/2012	7:55:35 AM	BCl3 MFC set to  0.000000
2/26/2012	7:55:35 AM	PH3 MFC set to  0.000000
2/26/2012	7:55:35 AM	SiCl4 MFC set to  0.000000
2/26/2012	7:55:35 AM	Bypass solenoid MFC set to  0.000000
2/26/2012	7:55:35 AM	Tube furnace set to 0
2/26/2012	7:55:36 AM	Run finished at 7:55 AM
2/26/2012	7:55:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/26/2012	7:58:59 AM	Recipe started at 7:58 AM
2/26/2012	7:58:59 AM	Helium valve closed
2/26/2012	7:58:59 AM	H2 valve closed
2/26/2012	7:58:59 AM	BCl3 valve closed
2/26/2012	7:58:59 AM	PH3 valve closed
2/26/2012	7:58:59 AM	SiCl4 pre valve closed
2/26/2012	7:58:59 AM	SiCl4 post valve closed
2/26/2012	7:58:59 AM	Bypass valve closed
2/26/2012	7:58:59 AM	Bubbler valve closed
2/26/2012	7:58:59 AM	Main Vac valve opened
2/26/2012	7:58:59 AM	Helium MFC set to  0.000000
2/26/2012	7:58:59 AM	H2 MFC set to  0.000000
2/26/2012	7:58:59 AM	BCl3 MFC set to  0.000000
2/26/2012	7:58:59 AM	PH3 MFC set to  0.000000
2/26/2012	7:58:59 AM	SiCl4 MFC set to  0.000000
2/26/2012	7:58:59 AM	Bypass solenoid MFC set to  0.000000
2/26/2012	7:58:59 AM	Tube furnace set to 0
2/26/2012	9:58:59 AM	Helium valve closed
2/26/2012	9:58:59 AM	H2 valve closed
2/26/2012	9:58:59 AM	BCl3 valve closed
2/26/2012	9:58:59 AM	PH3 valve closed
2/26/2012	9:58:59 AM	SiCl4 pre valve closed
2/26/2012	9:58:59 AM	SiCl4 post valve closed
2/26/2012	9:58:59 AM	Main Vac valve closed
2/26/2012	9:58:59 AM	Bypass valve closed
2/26/2012	9:58:59 AM	Bubbler valve closed
2/26/2012	9:58:59 AM	Helium MFC set to  0.000000
2/26/2012	9:58:59 AM	H2 MFC set to  0.000000
2/26/2012	9:58:59 AM	BCl3 MFC set to  0.000000
2/26/2012	9:58:59 AM	PH3 MFC set to  0.000000
2/26/2012	9:58:59 AM	SiCl4 MFC set to  0.000000
2/26/2012	9:58:59 AM	Bypass solenoid MFC set to  0.000000
2/26/2012	9:59:00 AM	Tube furnace set to 0
2/26/2012	9:59:03 AM	Helium valve closed
2/26/2012	9:59:03 AM	BCl3 valve closed
2/26/2012	9:59:03 AM	PH3 valve closed
2/26/2012	9:59:03 AM	SiCl4 pre valve closed
2/26/2012	9:59:03 AM	SiCl4 post valve closed
2/26/2012	9:59:03 AM	Main Vac valve closed
2/26/2012	9:59:03 AM	Bypass valve closed
2/26/2012	9:59:03 AM	Bubbler valve closed
2/26/2012	9:59:03 AM	H2 valve opened
2/26/2012	9:59:03 AM	Helium MFC set to  0.000000
2/26/2012	9:59:03 AM	H2 MFC set to  500.000000
2/26/2012	9:59:03 AM	BCl3 MFC set to  0.000000
2/26/2012	9:59:03 AM	PH3 MFC set to  0.000000
2/26/2012	9:59:03 AM	SiCl4 MFC set to  0.000000
2/26/2012	9:59:03 AM	Bypass solenoid MFC set to  0.000000
2/26/2012	9:59:03 AM	Tube furnace set to 0
2/26/2012	10:00:11 AM	Helium valve closed
2/26/2012	10:00:11 AM	BCl3 valve closed
2/26/2012	10:00:11 AM	PH3 valve closed
2/26/2012	10:00:11 AM	SiCl4 pre valve closed
2/26/2012	10:00:11 AM	SiCl4 post valve closed
2/26/2012	10:00:11 AM	Main Vac valve closed
2/26/2012	10:00:11 AM	Bypass valve closed
2/26/2012	10:00:11 AM	H2 valve opened
2/26/2012	10:00:11 AM	Bubbler valve opened
2/26/2012	10:00:11 AM	Helium MFC set to  0.000000
2/26/2012	10:00:11 AM	H2 MFC set to  500.000000
2/26/2012	10:00:11 AM	BCl3 MFC set to  0.000000
2/26/2012	10:00:11 AM	PH3 MFC set to  0.000000
2/26/2012	10:00:11 AM	SiCl4 MFC set to  0.000000
2/26/2012	10:00:11 AM	Bypass solenoid MFC set to  0.000000
2/26/2012	10:00:11 AM	Tube furnace set to 0
2/26/2012	10:00:12 AM	Helium valve closed
2/26/2012	10:00:12 AM	BCl3 valve closed
2/26/2012	10:00:12 AM	PH3 valve closed
2/26/2012	10:00:12 AM	SiCl4 pre valve closed
2/26/2012	10:00:12 AM	SiCl4 post valve closed
2/26/2012	10:00:12 AM	Main Vac valve closed
2/26/2012	10:00:12 AM	Bypass valve closed
2/26/2012	10:00:12 AM	H2 valve opened
2/26/2012	10:00:12 AM	Bubbler valve opened
2/26/2012	10:00:12 AM	Helium MFC set to  0.000000
2/26/2012	10:00:12 AM	H2 MFC set to  500.000000
2/26/2012	10:00:12 AM	BCl3 MFC set to  0.000000
2/26/2012	10:00:12 AM	PH3 MFC set to  0.000000
2/26/2012	10:00:12 AM	SiCl4 MFC set to  0.000000
2/26/2012	10:00:12 AM	Bypass solenoid MFC set to  0.000000
2/26/2012	10:00:12 AM	Tube furnace set to 1000
2/26/2012	10:25:12 AM	Helium valve closed
2/26/2012	10:25:12 AM	PH3 valve closed
2/26/2012	10:25:12 AM	Main Vac valve closed
2/26/2012	10:25:12 AM	Bypass valve closed
2/26/2012	10:25:12 AM	H2 valve opened
2/26/2012	10:25:12 AM	BCl3 valve opened
2/26/2012	10:25:12 AM	SiCl4 pre valve opened
2/26/2012	10:25:12 AM	SiCl4 post valve opened
2/26/2012	10:25:12 AM	Bubbler valve opened
2/26/2012	10:25:12 AM	Helium MFC set to  0.000000
2/26/2012	10:25:12 AM	H2 MFC set to  450.000000
2/26/2012	10:25:12 AM	BCl3 MFC set to  1.500000
2/26/2012	10:25:12 AM	PH3 MFC set to  0.000000
2/26/2012	10:25:12 AM	SiCl4 MFC set to  50.000000
2/26/2012	10:25:12 AM	Bypass solenoid MFC set to  0.000000
2/26/2012	10:25:12 AM	Tube furnace set to 1000
2/26/2012	10:44:12 AM	Helium valve closed
2/26/2012	10:44:12 AM	BCl3 valve closed
2/26/2012	10:44:12 AM	PH3 valve closed
2/26/2012	10:44:12 AM	SiCl4 pre valve closed
2/26/2012	10:44:12 AM	SiCl4 post valve closed
2/26/2012	10:44:12 AM	Main Vac valve closed
2/26/2012	10:44:12 AM	Bypass valve closed
2/26/2012	10:44:12 AM	H2 valve opened
2/26/2012	10:44:12 AM	Bubbler valve opened
2/26/2012	10:44:12 AM	Helium MFC set to  0.000000
2/26/2012	10:44:12 AM	H2 MFC set to  500.000000
2/26/2012	10:44:12 AM	BCl3 MFC set to  0.000000
2/26/2012	10:44:12 AM	PH3 MFC set to  0.000000
2/26/2012	10:44:12 AM	SiCl4 MFC set to  0.000000
2/26/2012	10:44:12 AM	Bypass solenoid MFC set to  0.000000
2/26/2012	10:44:12 AM	Tube furnace set to 750
2/26/2012	10:59:12 AM	H2 valve closed
2/26/2012	10:59:12 AM	BCl3 valve closed
2/26/2012	10:59:12 AM	PH3 valve closed
2/26/2012	10:59:12 AM	SiCl4 pre valve closed
2/26/2012	10:59:12 AM	SiCl4 post valve closed
2/26/2012	10:59:12 AM	Main Vac valve closed
2/26/2012	10:59:12 AM	Bypass valve closed
2/26/2012	10:59:12 AM	Helium valve opened
2/26/2012	10:59:12 AM	Bubbler valve opened
2/26/2012	10:59:12 AM	Helium MFC set to  500.000000
2/26/2012	10:59:12 AM	H2 MFC set to  0.000000
2/26/2012	10:59:12 AM	BCl3 MFC set to  0.000000
2/26/2012	10:59:12 AM	PH3 MFC set to  0.000000
2/26/2012	10:59:12 AM	SiCl4 MFC set to  0.000000
2/26/2012	10:59:12 AM	Bypass solenoid MFC set to  0.000000
2/26/2012	10:59:12 AM	Tube furnace set to 0
2/26/2012	11:19:12 AM	Helium valve closed
2/26/2012	11:19:12 AM	H2 valve closed
2/26/2012	11:19:12 AM	BCl3 valve closed
2/26/2012	11:19:12 AM	PH3 valve closed
2/26/2012	11:19:12 AM	SiCl4 pre valve closed
2/26/2012	11:19:12 AM	SiCl4 post valve closed
2/26/2012	11:19:12 AM	Main Vac valve closed
2/26/2012	11:19:12 AM	Bypass valve closed
2/26/2012	11:19:12 AM	Bubbler valve closed
2/26/2012	11:19:12 AM	Helium MFC set to  0.000000
2/26/2012	11:19:12 AM	H2 MFC set to  0.000000
2/26/2012	11:19:12 AM	BCl3 MFC set to  0.000000
2/26/2012	11:19:12 AM	PH3 MFC set to  0.000000
2/26/2012	11:19:12 AM	SiCl4 MFC set to  0.000000
2/26/2012	11:19:12 AM	Bypass solenoid MFC set to  0.000000
2/26/2012	11:19:13 AM	Tube furnace set to 0
2/26/2012	11:39:13 AM	Helium valve closed
2/26/2012	11:39:13 AM	H2 valve closed
2/26/2012	11:39:13 AM	BCl3 valve closed
2/26/2012	11:39:13 AM	PH3 valve closed
2/26/2012	11:39:13 AM	SiCl4 pre valve closed
2/26/2012	11:39:13 AM	SiCl4 post valve closed
2/26/2012	11:39:13 AM	Main Vac valve closed
2/26/2012	11:39:13 AM	Bubbler valve closed
2/26/2012	11:39:13 AM	Bypass valve opened
2/26/2012	11:39:13 AM	Helium MFC set to  0.000000
2/26/2012	11:39:13 AM	H2 MFC set to  0.000000
2/26/2012	11:39:13 AM	BCl3 MFC set to  0.000000
2/26/2012	11:39:13 AM	PH3 MFC set to  0.000000
2/26/2012	11:39:13 AM	SiCl4 MFC set to  0.000000
2/26/2012	11:39:13 AM	Bypass solenoid MFC set to  0.000000
2/26/2012	11:39:13 AM	Tube furnace set to 0
2/26/2012	11:39:59 AM	Helium valve closed
2/26/2012	11:39:59 AM	H2 valve closed
2/26/2012	11:39:59 AM	BCl3 valve closed
2/26/2012	11:39:59 AM	PH3 valve closed
2/26/2012	11:39:59 AM	SiCl4 pre valve closed
2/26/2012	11:39:59 AM	SiCl4 post valve closed
2/26/2012	11:39:59 AM	Main Vac valve closed
2/26/2012	11:39:59 AM	Bubbler valve closed
2/26/2012	11:39:59 AM	Bypass valve opened
2/26/2012	11:39:59 AM	Helium MFC set to  0.000000
2/26/2012	11:39:59 AM	H2 MFC set to  0.000000
2/26/2012	11:39:59 AM	BCl3 MFC set to  0.000000
2/26/2012	11:39:59 AM	PH3 MFC set to  0.000000
2/26/2012	11:39:59 AM	SiCl4 MFC set to  0.000000
2/26/2012	11:39:59 AM	Bypass solenoid MFC set to  0.000000
2/26/2012	11:39:59 AM	Tube furnace set to 0
2/26/2012	11:40:59 AM	Helium valve closed
2/26/2012	11:40:59 AM	H2 valve closed
2/26/2012	11:40:59 AM	BCl3 valve closed
2/26/2012	11:40:59 AM	PH3 valve closed
2/26/2012	11:40:59 AM	SiCl4 pre valve closed
2/26/2012	11:40:59 AM	SiCl4 post valve closed
2/26/2012	11:40:59 AM	Bypass valve closed
2/26/2012	11:40:59 AM	Bubbler valve closed
2/26/2012	11:40:59 AM	Main Vac valve opened
2/26/2012	11:40:59 AM	Helium MFC set to  0.000000
2/26/2012	11:40:59 AM	H2 MFC set to  0.000000
2/26/2012	11:40:59 AM	BCl3 MFC set to  0.000000
2/26/2012	11:40:59 AM	PH3 MFC set to  0.000000
2/26/2012	11:40:59 AM	SiCl4 MFC set to  0.000000
2/26/2012	11:40:59 AM	Bypass solenoid MFC set to  0.000000
2/26/2012	11:40:59 AM	Tube furnace set to 0
2/26/2012	12:19:25 PM	Run aborted at 12:19 PM
2/26/2012	12:19:25 PM	Helium valve closed
2/26/2012	12:19:25 PM	H2 valve closed
2/26/2012	12:19:25 PM	BCl3 valve closed
2/26/2012	12:19:25 PM	PH3 valve closed
2/26/2012	12:19:25 PM	SiCl4 pre valve closed
2/26/2012	12:19:25 PM	SiCl4 post valve closed
2/26/2012	12:19:25 PM	Bypass valve closed
2/26/2012	12:19:25 PM	Main Vac valve closed
2/26/2012	12:19:25 PM	Bubbler valve closed
2/26/2012	12:19:25 PM	Helium MFC set to  0.000000
2/26/2012	12:19:25 PM	H2 MFC set to  0.000000
2/26/2012	12:19:25 PM	BCl3 MFC set to  0.000000
2/26/2012	12:19:25 PM	PH3 MFC set to  0.000000
2/26/2012	12:19:25 PM	SiCl4 MFC set to  0.000000
2/26/2012	12:19:25 PM	Tube furnace set to 0
2/26/2012	12:19:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/26/2012	12:19:28 PM	Recipe started at 12:19 PM
2/26/2012	12:19:28 PM	Helium valve closed
2/26/2012	12:19:28 PM	H2 valve closed
2/26/2012	12:19:28 PM	BCl3 valve closed
2/26/2012	12:19:28 PM	PH3 valve closed
2/26/2012	12:19:28 PM	SiCl4 pre valve closed
2/26/2012	12:19:28 PM	SiCl4 post valve closed
2/26/2012	12:19:28 PM	Main Vac valve closed
2/26/2012	12:19:28 PM	Bypass valve closed
2/26/2012	12:19:28 PM	Bubbler valve closed
2/26/2012	12:19:28 PM	Helium MFC set to  0.000000
2/26/2012	12:19:28 PM	H2 MFC set to  0.000000
2/26/2012	12:19:28 PM	BCl3 MFC set to  0.000000
2/26/2012	12:19:28 PM	PH3 MFC set to  0.000000
2/26/2012	12:19:28 PM	SiCl4 MFC set to  0.000000
2/26/2012	12:19:28 PM	Bypass solenoid MFC set to  0.000000
2/26/2012	12:19:28 PM	Tube furnace set to 0
2/26/2012	12:19:31 PM	H2 valve closed
2/26/2012	12:19:31 PM	BCl3 valve closed
2/26/2012	12:19:31 PM	PH3 valve closed
2/26/2012	12:19:31 PM	SiCl4 pre valve closed
2/26/2012	12:19:31 PM	SiCl4 post valve closed
2/26/2012	12:19:31 PM	Main Vac valve closed
2/26/2012	12:19:31 PM	Bypass valve closed
2/26/2012	12:19:31 PM	Bubbler valve closed
2/26/2012	12:19:31 PM	Helium valve opened
2/26/2012	12:19:31 PM	Helium MFC set to  500.000000
2/26/2012	12:19:31 PM	H2 MFC set to  0.000000
2/26/2012	12:19:31 PM	BCl3 MFC set to  0.000000
2/26/2012	12:19:31 PM	PH3 MFC set to  0.000000
2/26/2012	12:19:31 PM	SiCl4 MFC set to  0.000000
2/26/2012	12:19:31 PM	Bypass solenoid MFC set to  0.000000
2/26/2012	12:19:31 PM	Tube furnace set to 0
2/26/2012	12:20:33 PM	Helium valve closed
2/26/2012	12:20:33 PM	H2 valve closed
2/26/2012	12:20:33 PM	BCl3 valve closed
2/26/2012	12:20:33 PM	PH3 valve closed
2/26/2012	12:20:33 PM	SiCl4 pre valve closed
2/26/2012	12:20:33 PM	SiCl4 post valve closed
2/26/2012	12:20:33 PM	Main Vac valve closed
2/26/2012	12:20:33 PM	Bypass valve closed
2/26/2012	12:20:33 PM	Bubbler valve closed
2/26/2012	12:20:33 PM	Helium MFC set to  0.000000
2/26/2012	12:20:33 PM	H2 MFC set to  0.000000
2/26/2012	12:20:33 PM	BCl3 MFC set to  0.000000
2/26/2012	12:20:33 PM	PH3 MFC set to  0.000000
2/26/2012	12:20:33 PM	SiCl4 MFC set to  0.000000
2/26/2012	12:20:33 PM	Bypass solenoid MFC set to  0.000000
2/26/2012	12:20:33 PM	Tube furnace set to 0
2/26/2012	12:20:34 PM	Run finished at 12:20 PM
2/26/2012	12:20:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/26/2012	12:23:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/26/2012	12:23:35 PM	Recipe started at 12:23 PM
2/26/2012	12:23:35 PM	Helium valve closed
2/26/2012	12:23:35 PM	H2 valve closed
2/26/2012	12:23:35 PM	BCl3 valve closed
2/26/2012	12:23:35 PM	PH3 valve closed
2/26/2012	12:23:35 PM	SiCl4 pre valve closed
2/26/2012	12:23:35 PM	SiCl4 post valve closed
2/26/2012	12:23:35 PM	Main Vac valve closed
2/26/2012	12:23:35 PM	Bubbler valve closed
2/26/2012	12:23:35 PM	Bypass valve opened
2/26/2012	12:23:35 PM	Helium MFC set to  0.000000
2/26/2012	12:23:35 PM	H2 MFC set to  0.000000
2/26/2012	12:23:35 PM	BCl3 MFC set to  0.000000
2/26/2012	12:23:35 PM	PH3 MFC set to  0.000000
2/26/2012	12:23:35 PM	SiCl4 MFC set to  0.000000
2/26/2012	12:23:35 PM	Bypass solenoid MFC set to  0.000000
2/26/2012	12:23:35 PM	Tube furnace set to 0
2/26/2012	12:24:34 PM	Helium valve closed
2/26/2012	12:24:34 PM	H2 valve closed
2/26/2012	12:24:34 PM	BCl3 valve closed
2/26/2012	12:24:34 PM	PH3 valve closed
2/26/2012	12:24:34 PM	SiCl4 pre valve closed
2/26/2012	12:24:34 PM	SiCl4 post valve closed
2/26/2012	12:24:34 PM	Main Vac valve closed
2/26/2012	12:24:34 PM	Bubbler valve closed
2/26/2012	12:24:34 PM	Bypass valve opened
2/26/2012	12:24:34 PM	Helium MFC set to  0.000000
2/26/2012	12:24:34 PM	H2 MFC set to  0.000000
2/26/2012	12:24:34 PM	BCl3 MFC set to  0.000000
2/26/2012	12:24:34 PM	PH3 MFC set to  0.000000
2/26/2012	12:24:34 PM	SiCl4 MFC set to  0.000000
2/26/2012	12:24:34 PM	Bypass solenoid MFC set to  0.000000
2/26/2012	12:24:35 PM	Tube furnace set to 0
2/26/2012	12:25:35 PM	Helium valve closed
2/26/2012	12:25:35 PM	H2 valve closed
2/26/2012	12:25:35 PM	BCl3 valve closed
2/26/2012	12:25:35 PM	PH3 valve closed
2/26/2012	12:25:35 PM	SiCl4 pre valve closed
2/26/2012	12:25:35 PM	SiCl4 post valve closed
2/26/2012	12:25:35 PM	Bypass valve closed
2/26/2012	12:25:35 PM	Bubbler valve closed
2/26/2012	12:25:35 PM	Main Vac valve opened
2/26/2012	12:25:35 PM	Helium MFC set to  0.000000
2/26/2012	12:25:35 PM	H2 MFC set to  0.000000
2/26/2012	12:25:35 PM	BCl3 MFC set to  0.000000
2/26/2012	12:25:35 PM	PH3 MFC set to  0.000000
2/26/2012	12:25:35 PM	SiCl4 MFC set to  0.000000
2/26/2012	12:25:35 PM	Bypass solenoid MFC set to  0.000000
2/26/2012	12:25:35 PM	Tube furnace set to 0
2/26/2012	12:25:36 PM	Run finished at 12:25 PM
2/26/2012	12:25:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
